Matthew Goeckner Erik Jonsson School of Engineering and Computer Science
Associate Professor, Electrical Engineering
Dr. Goeckner directs UT Dallas' Plasma Science Laboratory, which is focused on
the development of industrially relevant plasmas and related tools.
Goeckner has performed research on a wide variety of plasma systems and related diagnostics. He has worked with CVD of polymer materials, laser CVD/CVD of metals, etching of a variety of thin films, implant of dopants and related diagnostics.
He is a member of the American Vacuum Society Plasma Sciences and Technology Division and a senior member of IEEE's Nuclear and Plasma Sciences Division.
Goeckner has worked as a research physicist at the Princeton Plasma Physics Laboratory, a research engineer at
Varian Medical Systems Central Research, and a research engineer at Varian Semiconductor Equipment Central Research. He received his Ph.D. in physics from the University of Iowa.
Updated: November 29, 2011
