Bay 1 Thermal Processing
Bay 2 Lithography
Bay 3 Metallization & Etch
Bay 4 Surface Chemistry
Bay 5 Characterization
The UTD Cleanroom Research Laboratory is a facility with filtered, vertical laminar flow air, equipped with versatile semiconductor process research equipment assembled for the purpose of supporting university research in the fields of microelectronics, electronic materials, nanotechnology, MEMS, lithography, optics, and other areas requiring a particle-free environment.
The Cleanroom Research Laboratory is a cross-disciplinary center. It is physically located at the "Natural Science & Engineering Research Laboratories" building, or NSERL. A university-wide advisory committee, composed of members from diverse fields, provides the associate director of the facility with information on the needs and desires associated with faculty research.
The Cleanroom Research Laboratory at the University of Texas at Dallas offers an excellent location for various technical organizations and companies to carry out research activities. The Laboratory includes facilities for device fabrication and characterization with a range of equipment, such as plasma etch, PECVD, LPCVD, Metallization (sputter, e-gun, thermal evap) wet chemical stations, thermal (oxidation/diffusion, RTP) Lithography, and surface analysis tools. An external user agreement must be completed and approved for access. Contact the associate director for details.
Cleanroom User Announcements