The Sentech 800 is an automated spectroscopic ellipsometer that can measure thickness, refractive index, and absorption properties of multi-layer thin film stacks. The spectral range of its Xenon arc lamp source is in the 350 nm - 850 nm UV-Visible range. which is ideal for most semiconductor materials. The tool is operated by a comprehensive software package, called SpectraRay, that controls data acquisition, modeling, fitting, and reporting of ellipsometric data.


User Manual


Updated: 2008-04-28