TEMESCAL E-BEAM DEPOSITION

Temescal 1800 e-beam evaporator is a single-chamber system for the thin-film evaporation. A maximum of four different materials can be evaporated in one pump-down cycle, from the four pocket electron gun. The thickness of the metal is monitored during the evaporation  by an Inficon thickness monitor. Substrates up to 4 inches can be attached to the rotating substrate holder. The system does not have substrate heating . The available materials are: Au, Ag, Al, Cr, Ni, Pt, Tungsten and Ti.  The vacuum system has been upgraded to a cryo pump.

 

User Manual

Process Data

Aluminum

Control Chart

Aluminum

Updated: 2008-11-21