Cleanroom Tools

View the Tool Identification List for the cleanroom by selecting this link.

General descriptions of the tool set is described below.

 

Characterization & Metrology

Deposition

 

Plasma Etch

 

Lithography

         

Packaging

 

Thermal Processing


Thin Film Deposition

 

Surface Chemistry (Wet Processing)

 

          

 

Updated: 2014-10-02