Cleanroom Tools
View the Tool Identification List for the cleanroom by selecting this link.
General descriptions of the tool set is described below.
Characterization & Metrology
- Leica INM 200 Optical Microscope
- Leica INM 100 Optical Microscope
- Zeiss Supra 40 Scanning Electron Microscope
- Veeco Dimension 5000 SPM
- Sentech Ellipsometer
- Prometrix Auto 4-point probe
- Alessi 4-point probe
- Thermo Electron FTIR Spectrometer w/Ge ATR
- TOHO FLX2320 Thin Film Stress Measurement
- Veeco Dektak VIII Profilometer
- Nanometrics Nanospec Film Thickness
- Rame'-Hart Goniometer (page under construction)
Deposition
-
Tystar LPCVD Furnace
-
Plasma-Therm 790 PECVD
- Cambridge Atomic Layer Deposition
- SCS Parylene Deposition
Plasma Etch
Lithography
- Heidelberg DWL66 Laser Writer
-
Quintel Q4000-6 Contact Printer
-
Karl Suss MA6B Contact Printer
- Obducat Nano-Imprinter NIL-2.5" Imprint
- Headway Spinner
- CPK Chrome Etch & Base Develop
- CPK Solvent Develop
- Blue M Ovens
- Cole Parmer Digital Hot Plates
- TPS Digital Hot Plates
- Raith 150-TWO E-Beam Litho (page under construction)
Packaging
Thermal Processing
Thin Film Deposition
- Cryo-evaporator e-gun Deposition
- Temescal e-gun Deposition
- CHA Mark 50 e-gun Evaporator
- Denton Vacuum Thermal Evaporator
- Hummer VI Sputter (for SEM samples)
-
AJA 1500 Sputter
-
AJA Orion Sputter
Surface Chemistry (Wet Processing)
- Avenger Basic Dual Chamber Spin Rinse Dryer
- Tousimis Supercritical Drier (MEM structure release)
- Samco UV Ozone Stripper/Cleaner
- Acid Hood
-
Base Hood
-
RCA Hood
- General Solvent Hood
- Solvent Hood
Updated: 2012-07-26
