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Only 15 years after University of California, Berkeley, engineers
built the first micro-scale motor, a UC Berkeley physicist
has created the first nano-scale motor - a gold rotor on a
nanotube shaft that could ride on the back of a virus.
"It's the smallest synthetic motor that's ever been
made," said Alex Zettl, professor of physics at UC Berkeley
and faculty scientist at Lawrence Berkeley National Laboratory.
"Nature is still a little bit ahead of us - there are
biological motors that are equal or slightly smaller in size
- but we are catching up."
Zettl and his UC Berkeley graduate students and post-docs
report their feat in the July 24 issue of Nature.
The electrostatic motors represent a milestone in nanotechnology,
and prove that nanotubes and other nanostructures several
hundred times smaller than the diameter of a human hair can
be manipulated and assembled into true devices.
Zettl and other scientists had previously made transistors
from nanotubes, but this device is different, he said.
Such motors could have numerous uses, Zettl said. Because
the rotor can be positioned at any angle, the motor could
be used in optical circuits to redirect light, a process called
optical switching. The rotor could be rapidly flipped back
and forth to create a microwave oscillator, or the spinning
rotor could be used to mix liquids in microfluidic devices.
The motor is about 500 nanometers across, 300 times smaller
than the diameter of a human hair. While the part that rotates,
the rotor, is between 100 and 300 nanometers long, the carbon
nanotube shaft to which it is attached is only a few atoms
across, perhaps 5-10 nanometers thick.
In 1988, UC Berkeley electrical engineering professor Richard
Muller and colleagues in the Berkeley Sensor & Actuator
Center (BSAC) fabricated from silicon the world's first operating
micromotor. Their electrostatic motor was 100 microns across,
or about the width of a human hair.
While the microelectromechanical system (MEMS) motor still
awaits appreciable industrial application, Muller said, other
actuated MEMS devices have become commonplace. MEMS accelerometers,
in part based on micromachining technology developed in BSAC,
are now used in almost all automobile airbag deployment systems
and in many heart pacemakers. MEMS micromirror arrays are
vying with liquid-crystal arrays in state-of-the-art display
projectors.
One unexpected difficulty is that the techniques for measuring
the motor's speed are as yet too crude. The team's scanning
electron microscope (SEM) can take pictures every 33 milliseconds
and no faster, so they can't tell whether the rotor spins
or flips faster than 30 times per second.
Microwave frequencies, common in communication networks,
are above a billion cycles per second, in the gigahertz frequency
range.
The motor's shaft is a multiwalled nanotube, that is, it
consists of nested nanotubes much like the layers of a leek.
Annealed both to the rotor and fixed anchors, the rigid nanotube
allows the rotor to move only about 20 degrees. However, the
team was able to break the outer wall of the nested nanotubes
to allow the outer tube and attached rotor to freely spin
around the inner tubes as a nearly frictionless bearing.
To build the motor, Zettl and his team made a slew of multiwalled
nanotubes in an electric arc and deposited them on the flat
silicon oxide surface of a silicon wafer. They then identified
the best from the pile with an atomic force microscope, a
device capable of picking up single atoms.
A gold rotor, nanotube anchors and opposing stators were
then simultaneously patterned around the chosen nanotubes
using electron beam lithography. A third stator was already
buried under the silicon oxide surface. The rotor was annealed
to the nanotubes and then the surface selectively etched to
provide sufficient clearance for the rotor.
When the stators were charged with up to 50 volts of direct
current, the gold rotor deflected up to 20 degrees, which
was visible in the SEM. With alternating voltage, the rotor
rocked back and forth, acting as a torsional oscillator. Such
an oscillator, probably capable of microwave frequency oscillations
from hundreds of megahertz to gigahertz, could be useful in
many types of devices - in particular, communications devices
such as cell phones or computers.
With a strong electrical jolt to the stators, the team was
able to jerk the rotor and break the outer wall of the nested
nanotubes, allowing the rotor to spin freely on the nested
nanotube bearings. Zettl had made similar bearings several
years ago, but this was the first time he had put them to
use.
Interestingly, the rotor does not continue spinning for long
once the electricity is turned off. It is so small that it
has little inertia, so any tiny electric charges remaining
on the device after it's turned off tend to stop the rotor
immediately.
Zettl expects to be able to reduce the size even further,
perhaps by a factor of five. For the moment, though, he and
his team are trying to make basic quantum measurements, such
as the conductance through the nanotubes and the amount of
friction in the bearings.
Zettl's collaborators on the paper are graduate students
A. M. Fennimore, T. D. Yuzvinsky and John Cumings and post-docs
Wei-Qiang Han and M. S Fuhrer. Fuhrer now is with the Department
of Physics at the University of Maryland, College Park. Cumings
is now with the Department of Physics at Stanford University.
The work is supported by the National Science Foundation
and the Office of Energy Research of the U.S. Department of
Energy.
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