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The University of Texas at Dallas |
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Natural Science & Engineering Research Laboratory
Selected NSERL Cleanroom Tools
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Approved Materials |
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Thermal
Processing
Bay Lithography Bay Metallization Bay Surface Chemistry Bay Characterization Bay |
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Tool Authorization |
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Thermal
Processing
Bay Lithography Bay Metallization Bay Surface Chemistry Bay Characterization bay |
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Welcome to Gordon's Home Page! |
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This web site is new and heavily under construction. Do not expect all the links to work or the posted documents to be accurate! Right now, it is simply a place holder where UTD Clean Room tool documentation can be posted and reviewed by staff before publication on the official UTD Clean Room web site. Eventually, this site will turn into a personal web page. |
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Contact Information |
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Gordon P. Pollack, Ph.D. Department of Electrical Engineering University of Texas at Dallas Richardson, Texas 75083 gordon.pollack@utdallas.edu Phone: Office (972)883-6627 Fax (972) 883-5742 |
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Useful Links |
| NSERL Cleanroom |
| tool |
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What do you think? |
| I hope that you have found this site useful. Your suggestions for improvement are always welcome. |