The University of Texas at Dallas

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Natural Science & Engineering Research Laboratory

Selected NSERL Cleanroom Tools

Clean
Acid Hood
Base Hood
RCA Hood
Solvent Hood
Gen. Solvent Hood

Deposition
AJA 1500 Sputter
AJA Orion Sputter
Cambridge ALD
CHA Mark 50
Cryo Evap
Temescal Evap
Tystar LPCVD
Unaxis PECVD

Etch
March Asher
Plasma-Therm DSE
Plasma-Therm ICP
Plasma-Therm III-V
Technics RIE

Lithography
DWL66 Writer
Quintel Printer
Suss Printer

Metrology
Profilometer
Ellipsometer
Nanospec

Thermal
JetFirst RTP
MPTC 600 RTP
MiniBrute Furn.
Tystar Furnace

Approved Materials

Thermal Processing Bay

Lithography Bay

Metallization Bay

Surface Chemistry Bay

Characterization Bay

Tool Authorization

Thermal Processing Bay

Lithography Bay

Metallization Bay

Surface Chemistry Bay

Characterization bay

Welcome to Gordon's Home Page!

This web site is new and heavily under construction. Do not expect all the links to work! Right now, it is simply a place holder where UTD Clean Room tool documentation can be posted and reviewed by staff before publication on the official UTD Clean Room web site. Eventually, this site will turn into a personal web page.

Contact Information

Gordon Pollack, Ph.D.
Department of Research
University of Texas at Dallas
Richardson, Texas 75080
Email: gordon.pollack@utdallas.edu
Phone: Office (972)883-6627 

Useful Links

NSERL Cleanroom

Online Units Conversion

SiO2 Thickness Calculator

What do you think?

I hope that you have found this site useful. Your suggestions for improvement are always welcome.

 Click here to submit

December, 2014, Gordon Pollack, University of Texas at Dallas