The University of Texas at Dallas

Natural Science and Engineering Research Laboratory


NSERL Cleanroom Tools


User Manual

Process Data


Control Chart


AJA Orion Sputter Tool

The ATC Orion sputter deposition system, by AJA International, has the capability to co-sputter conductive and insulating materials on substrates up to 100mm in diameter. In addition to Ar sputtering, N2 or O2 are also available for use in reactive-ion sputtering. The tool is equipped with 3 RF and 2 DC magnetron sources. The substrate is capable of heating to 800C while under rotation as well as exposure to reactive gasses and RF bias. Software for control of the various source shutters is also available for automated film stack deposition.

March, 2013, Gordon Pollack, University of Texas at Dallas