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The University of Texas at Dallas |
Natural Science and Engineering Research Laboratory
NSERL Cleanroom Tools
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Documentation |
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User Manual |
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Process Data |
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Aluminum |
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Control Chart |
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Aluminum |
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CHA Mark 50 E-Gun Evaporator |
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The CHA Mark 50 evaporator is a 3 gun 13 kilowatt cryo pumped e-gun metal evaporator allowing co-deposition by running 2 guns simultaneously. This uses an EB-13 crucible and is used for gold, copper, and chrome evaporation. |
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