 |
|
The University of Texas at Dallas |
Natural Science and Engineering Research Laboratory
NSERL Cleanroom Tools
Documentation
Process Data
Control Charts
|
CHA Mark 50 E-Gun Evaporator |
|
|
The CHA Mark 50 evaporator is a 3 gun 13 kilowatt cryo pumped e-gun metal evaporator allowing co-deposition by running 2 guns simultaneously. This uses an EB-13 crucible and is used for gold, copper, and chrome evaporation. |
 |