The University of Texas at Dallas

Natural Science and Engineering Research Laboratory

Home

NSERL Cleanroom Tools

Documentation


User Manual

Process Data


Aluminum

Control Chart


Aluminum

CHA Mark 50 E-Gun Evaporator

The CHA Mark 50 evaporator is a 3 gun 13 kilowatt cryo pumped e-gun metal evaporator allowing co-deposition by running 2 guns simultaneously.  This uses an EB-13 crucible and is used for gold, copper, and chrome evaporation.

March, 2013, Gordon Pollack, University of Texas at Dallas