The University of Texas at Dallas

Natural Science and Engineering Research Laboratory

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Calculate Oxide Thickness from Time

 




Time(min): 

 
Ambient






Calculate Oxide Thickness from Time

Silicon Thermal Oxide Thickness Calculator

This application calculates the <100> silicon thermal oxide thickness for a given oxidation time, temperature, and ambient for the Tystar oxidation furnace.

June, 2013, Gordon Pollack, University of Texas at Dallas