The University of Texas at Dallas

Natural Science and Engineering Research Laboratory

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March Asher

The March PX250, is a highly versatile plasma etcher. It will produce three distinctly different plasma conditions: 1) Standard plasma etch, 2) Reactive Ion Etch, and 3) Downstream Plasma Etch. It achieves this via a system of removable and reversible electrode shelves whereby the substrates to be etched can be placed on a grounded or powered or neutral shelf, thus producing the various plasma etch conditions. We have initially assigned this tool for Oxygen plasma ashing of organic films mainly photoresist.

December, 2011, Gordon Pollack, University of Texas at Dallas