The University of Texas at Dallas

Natural Science and Engineering Research Laboratory


NSERL Cleanroom Tools


User Manual

Process Data

Tube 4: 10nm Oxide

Control Chart

Tube 4: 10nm Oxide


Tube 4: 10nm Oxide BV

Tube 4: 10nm Oxide CV

MimiBrute Atmospheric Furnace

The four-stack Thermco MiniBrute atmospheric furnace system provides basic oxidation and annealing capabilities needed for device fabrication on wafers up to 100 mm in diameter. The system is presently configured to allow either O2, 10% O2 + 90% N2, N2, or forming gas to be delivered to all tubes. The two bottom tubes are restricted to silicon-only processing. The bottom tube, which is used only for silicon oxidation, can also be connected to a steam generator for wet oxidation processes. The top tubes are designated for general use.

January, 2015, Gordon Pollack, University of Texas at Dallas