The University of Texas at Dallas

Natural Science and Engineering Research Laboratory


NSERL Cleanroom Tools


User Manual

Process Data

Silicon Nitride

Silicon Oxide

Control Charts

Silicon Nitride

Silicon Oxide

Plasma-Therm DSE Etcher

The Plasma-Therm dielectric etch and DSE (Deep Silicon Etch) tool is configured for etching films using fluorine based chemistries. Presently, SF6, CHF3, C4F8, and O2, process gases are installed on the tool. The tool is equipped with a vacuum load-lock to prevent potentially toxic etch by-products from venting to the Cleanroom during sample load and unload.

December, 2011, Gordon Pollack, University of Texas at Dallas