The University of Texas at Dallas

Natural Science and Engineering Research Laboratory


NSERL Cleanroom Tools


User Manual

Plasma-Therm III-V Etcher

The Plasma-Therm III-V etcher is configured for etching III-V compound semiconductors using chlorine and fluorine based chemistries. Presently, Cl2, BCl3, HBr, CHF3, SF6, CH4, O2, N2, H2, He, and Ar are installed on the tool. The tool is capable of sample heating up to 180C and is  equipped with an end-point detection and thickness monitoring system.

December, 2011, Gordon Pollack, University of Texas at Dallas