The University of Texas at Dallas

Natural Science and Engineering Research Laboratory


NSERL Cleanroom Tools


User Manual

RCA Cleanup Hood

The RCA Hood is designed for the safe handling and disposal of RCA silicon wafer cleanup solutions. It is constructed of chemical and fire resistant white plastic with a 5.5 by 2.6 foot working surface. The hood features four temperature controlled cleanup baths, two cascade rinse tanks, a deionized-water sink and faucet, DI water and nitrogen spray guns, and three process timers.

December, 2011, Gordon Pollack, University of Texas at Dallas