The University of Texas at Dallas

Natural Science and Engineering Research Laboratory


NSERL Cleanroom Tools


User Manual

Process Data

Control Charts

MPTC RTP-600 Rapid Thermal Processor

The MPTC RTP-600 is a compact, single-wafer, desk-top rapid thermal process system that is capable of rapidly heating samples from ambient up to 1200 C. The tool features an easily interchangeable quartz heating chamber with closed-loop temperature control and programmable Time-Temperature profiles. The reaction chamber is configured to hold 100 mm wafers. The UTD Cleanroom has two of these tools. One unit is plumbed with nitrogen and oxygen and the other with nitrogen and forming gas.

December, 2011, Gordon Pollack, University of Texas at Dallas