The University of Texas at Dallas

Natural Science and Engineering Research Laboratory

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Sentech 800 Ellipsometer

The Sentech 800 is an automated spectroscopic ellipsometer that can measure thickness, refractive index, and absorption properties of multi-layer thin film stacks. The spectral range of its Xenon arc lamp source is in the 350 nm - 850 nm UV-Visible range. which is ideal for most semiconductor materials. The tool is operated by a comprehensive software package, called SpectraRay, that controls data acquisition, modeling, fitting, and reporting of ellipsometric data.

June, 2007, Gordon Pollack, University of Texas at Dallas