The University of Texas at Dallas

Natural Science and Engineering Research Laboratory


NSERL Cleanroom Tools


User Manual

Sentech 800 Ellipsometer

The Sentech 800 is an automated spectroscopic ellipsometer that can measure thickness, refractive index, and absorption properties of multi-layer thin film stacks. The spectral range of its Xenon arc lamp source is in the 350 nm - 850 nm UV-Visible range. which is ideal for most semiconductor materials. The tool is operated by a comprehensive software package, called SpectraRay, that controls data acquisition, modeling, fitting, and reporting of ellipsometric data.

June, 2007, Gordon Pollack, University of Texas at Dallas