Temescal E-Gun Evaporator

The Temescal 1800 e-beam evaporator is a single-chamber system for the thin-film evaporation. A maximum of four different materials can be evaporated in one pump-down cycle, from the four pocket electron gun. The thickness of the metal is monitored during the evaporation by an Inficon thickness monitor. Substrates up to 4 inches can be attached to the rotating substrate holder. The system does not have substrate heating. The available materials are: Au, Ag, Al, Cr, Ni, Pt, Tungsten and Ti. The vacuum system has been upgraded to a cryo pump.