The University of Texas at Dallas

Natural Science and Engineering Research Laboratory

Home

NSERL Cleanroom Tools

Documentation


User Manual

Process Data


Aluminum

Control Chart


Aluminum

Temescal E-Gun Evaporator

The Temescal 1800 e-beam evaporator is a single-chamber system for the thin-film evaporation. A maximum of four different materials can be evaporated in one pump-down cycle, from the four pocket electron gun. The thickness of the metal is monitored during the evaporation by an Inficon thickness monitor. Substrates up to 4 inches can be attached to the rotating substrate holder. The system does not have substrate heating. The available materials are: Au, Ag, Al, Cr, Ni, Pt, Tungsten and Ti. The vacuum system has been upgraded to a cryo pump.

March, 2013, Gordon Pollack, University of Texas at Dallas