Welcome to Lawrence J. Overzet's Web Pages

UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

Why and How to Pulse a Plasma.

L. J. Overzet

The University of Texas at Dallas, Plasma Applications Lab.

Why and How to Pulse a Plasma.

PP Presentation

Advantages of modulated-power plasma processing.

Advantages of modulated-power plasma processing.

Advantages of modulated-power plasma processing.

“Regimes” in modulated-power “pulsed” discharges.

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

The GEC plasma reactor setup.

Langmuir probe measurement of pulsed CC plasma.

Now we can ask: Why should a pulsed plasma help?

Getting negative ions to surfaces.

Negative ion extraction: How can that be done?

The capacitively coupled plasma experimental setup.

The inductively coupled plasma experimental setup.

General ion flux characteristics - Pulsed CCP and ICP.

Positive and negative ion flux vs. time.

Negative ion flux vs. energy and time. (Shielded ICP)

Why should a pulsed plasma help?

Why should a pulsed plasma help?

Langmuir double-probe measurements in SF6 (recent).

Equipment issues. Power Generators.

Equipment issues. Matching Networks (MN).

The voltage and current at discharge turn on.

RF I-V signals versus time.

The power at discharge turn on.

RF I-V signals versus time to an ICP discharge.

Equipment issues. Multiple Power Sources (MPS).

Equipment issues. Diagnostic Tools: I-V probes.

Equipment issues. Diagnostic Tools: Langmuir probes.

Equipment issues. Diagnostic Tools: Optical probes and endpoint measurement.

The Bottom Line:

Schematic Diagrams of Experimental Apparatus

The density distributions from a simulation.

Langmuir probe measurement of pulsed CC plasma.

You must be able to absorb the electron current

The sheath electric field must remain reversed


Main Page L.J.O. Vita  P.A. Lab  Presentations Course Info.   Teaching On-Site  Consulting 

University of Texas at Dallas,
P.O. Box 830688, EC33
Richardson, TX 75083-0688
Tel: (972)883-2154
Fax: (972)883-6839
email: [email protected]
 
Return to Department of Electrical Engineering Home Page