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UNDER RECONSTRUCTION (slowly...) Updated: 10/97
Why and How to Pulse a Plasma.
PP Presentation
Advantages of modulated-power plasma processing.
“Regimes” in modulated-power “pulsed” discharges.
“Regimes” in modulated-power discharges.
The GEC plasma reactor setup.
Langmuir probe measurement of pulsed CC plasma.
Now we can ask: Why should a pulsed plasma help?
Getting negative ions to surfaces.
Negative ion extraction: How can that be done?
The capacitively coupled plasma experimental setup.
The inductively coupled plasma experimental setup.
General ion flux characteristics - Pulsed CCP and ICP.
Positive and negative ion flux vs. time.
Negative ion flux vs. energy and time. (Shielded ICP)
Why should a pulsed plasma help?
Langmuir double-probe measurements in SF6 (recent).
Equipment issues. Power Generators.
Equipment issues. Matching Networks (MN).
The voltage and current at discharge turn on.
RF I-V signals versus time.
The power at discharge turn on.
RF I-V signals versus time to an ICP discharge.
Equipment issues. Multiple Power Sources (MPS).
Equipment issues. Diagnostic Tools: I-V probes.
Equipment issues. Diagnostic Tools: Langmuir probes.
Equipment issues. Diagnostic Tools: Optical probes and endpoint measurement.
The Bottom Line:
Schematic Diagrams of Experimental Apparatus
The density distributions from a simulation.
You must be able to absorb the electron current
The sheath electric field must remain reversed