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Why and How to Pulse a Plasma.

L. J. Overzet

The University of Texas at Dallas, Plasma Applications Lab.

Why and How to Pulse a Plasma.

PP Presentation

Advantages of modulated-power plasma processing.

Advantages of modulated-power plasma processing.

Advantages of modulated-power plasma processing.

“Regimes” in modulated-power “pulsed” discharges.

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

The GEC plasma reactor setup.

Langmuir probe measurement of pulsed CC plasma.

Now we can ask: Why should a pulsed plasma help?

Getting negative ions to surfaces.

Negative ion extraction: How can that be done?

The capacitively coupled plasma experimental setup.

The inductively coupled plasma experimental setup.

General ion flux characteristics - Pulsed CCP and ICP.

Positive and negative ion flux vs. time.

Negative ion flux vs. energy and time. (Shielded ICP)

Why should a pulsed plasma help?

Why should a pulsed plasma help?

Langmuir double-probe measurements in SF6 (recent).

Equipment issues. Power Generators.

Equipment issues. Matching Networks (MN).

The voltage and current at discharge turn on.

RF I-V signals versus time.

The power at discharge turn on.

RF I-V signals versus time to an ICP discharge.

Equipment issues. Multiple Power Sources (MPS).

Equipment issues. Diagnostic Tools: I-V probes.

Equipment issues. Diagnostic Tools: Langmuir probes.

Equipment issues. Diagnostic Tools: Optical probes and endpoint measurement.

The Bottom Line:

Schematic Diagrams of Experimental Apparatus

The density distributions from a simulation.

Langmuir probe measurement of pulsed CC plasma.

You must be able to absorb the electron current

The sheath electric field must remain reversed


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University of Texas at Dallas,
P.O. Box 830688, EC33
Richardson, TX 75083-0688
Tel: (972)883-2154
Fax: (972)883-6839
email: overzet@utdallas.edu
 
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