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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

• Turn-on. ~10 to 500 ms.
  • Rising ne. Larger electron average energy.
  • Low ion flux density. (Ion density rising.)
  • Power NOT well matched (varying plasma impedance.)
  • Plasma sheaths forming and changing with plasma ignition.
  • Often a larger plasma potential.

Time

Power

Turn-on

Steady State

Turn-off

Late Afterglow

RF

Voltage

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