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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

• Steady State (on).
  • Large nearly constant ne. Medium electron energy.
  • Large positive ion flux density.
  • Power well matched to nearly constant plasma impedance.
  • Plasma sheaths oscillating in steady state fashion Ž I.E.D.
  • Medium plasma potential.

Time

Power

Turn-on

Steady State

Turn-off

Late Afterglow

RF

Voltage

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