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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

• Turn-off.
  • Falling ne. Rapidly decreasing electron average energy.
  • Rapidly falling ion flux density. (Plasma potential falling.)
  • Power falling. (Energy stored in matching network?)
  • Plasma sheaths disintegrating with electron density decay.
  • Plasma potential falling with electron energy and density.

Time

Power

Turn-on

Steady State

Turn-off

Late Afterglow

RF

Voltage

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