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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

“Regimes” in modulated-power discharges.

“Regimes” in modulated-power discharges.

• Late Afterglow.
  • Zero power.
  • Small ne. Near thermal electron average energy.
  • Small ion flux density. (Negative ions can reach surfaces.)
  • Plasma sheaths disintegrated with electron density decay.
  • Plasma potential zero or even negative.

Time

Power

Turn-on

Steady State

Turn-off

Late Afterglow

RF

Voltage

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