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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

The GEC plasma reactor setup.

The GEC plasma reactor setup.

8” viewport:

Excellent optical access,

good MWI access.

Upper:

Shown: a TCP coil and quartz window (5 turn, ~ 2.5” radius).

Not shown: A 2” radius electrode (CCP source).

Lower: Chuck

electrode and

ground shield.

(~ 4” diameter.)

N2

plasma

glow

Langmuir

probe

access

from the

rear.

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