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Welcome to Lawrence J. Overzet's Web Pages UNDER RECONSTRUCTION (slowly...) Updated: 10/97 |
Langmuir probe measurement of pulsed CC plasma.Langmuir probe measurement of pulsed CC plasma.Time resolved Langmuir probe (LP) and microwave interferometer (MWI) measurements of a 200 mTorr nitrogen glow at 380 Vop and -80 Vdc bias. The Langmuir probe was centered axially and radially between the electrodes. The RF power was square wave amplitude modulated at 500 Hz, 50% duty cycle and 100% modulation depth.Top: Plasma and floating potentials.Center: Electron {Ne(LP) & MWI} and positive ion {Np(LP)} densities.Bottom: kTe.
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