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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

The capacitively coupled plasma experimental setup.

The capacitively coupled plasma experimental setup.

Mass spectrometer

with energy analyzer

Pinhole aperture in

grounded electrode

typical is 50 - 100 mm

Driven electrode.

The dc bias voltage

remains at turn-off.

Ground shield

and insulator

Mass

spec.

ground

isolation

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