Welcome to Lawrence J. Overzet's Web Pages

UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

The inductively coupled plasma experimental setup.

The inductively coupled plasma experimental setup.

Mass spectrometer

with energy analyzer

Pinhole aperture in

chuck electrode

typical is 50 - 100 mm

Mass

spec.

ground

isolation

Faraday

shielded

ICP source

~

SF6 plasma glow.

Previous slide

Next slide

Back to the first slide

View Graphic Version