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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

Positive and negative ion flux vs. time.

Positive and negative ion flux vs. time.

• CF4 CCP, 60 mTorr,

10 sccm, 200 VOP, No applied DC Bias voltage.

• CF3+ measured at its peak near 26 eV.
• F- measured at its peak near 6 eV.
• Alternating Irradiations of + and - ions.

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