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Negative ion flux vs. energy and time. (Shielded ICP)

Negative ion flux vs. energy and time. (Shielded ICP)

  • F - flux versus time and energy to a grounded electrode with 50 mm pinhole. Aspect ratio = 10:1.
  • Gas: SF6

20 mTorr,10 sccm,

  • ICP source:

49 VOP, 14.6 AOP, 253 Watts,

DC Bias voltage between probe and pinhole = 50 V.

F - flux at 10 eV

ICP power turn-off

at 0 ms. (Turn-on at

1000 ms.)

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