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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

Why should a pulsed plasma help?

Why should a pulsed plasma help?

  • “Dust” particle formation can be diminished.
    • Negative ions are trapped in the glow by the plasma sheaths.
    • Some can polymerize ̃ formation of particulates.

The sheath does not disintegrate in CW plasmas so

negative ions are trapped and can polymerize for long times.

RF Power

The rf power is modulated in pulsed discharges and the sheaths

disintegrate periodically. As a consequence, negative ions can

be lost to the walls before they polymerize.

Neg. ions

lost.

Neg. ions

lost.

Plasma produced.

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