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Langmuir double-probe measurements in SF6 (recent).

Langmuir double-probe measurements in SF6 (recent).

• SF6, 20 mTorr, 150 W,

5 ms period, 50% duty cycle.

• Notes:
  • Te is large (0 - 1 ms).
  • Te drops quickly at RF OFF (2.5 ms) after that, the readings are false. (Te is undefined when ne = 0.)
  • Ion density rises slowly at turn-on.
  • Vf rises slowly at turn-on

  RF ON

  RF OFF

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