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Updated: 10/97
Equipment issues. Matching Networks (MN).
Equipment issues. Matching Networks (MN).
Pulsed power may disrupt automatic MNs.
Tuning can become very poor. (MN “confused” by time dependent power.)
The best match point is often NOT the same as that in the steady state regime or for a continuous plasma.
MN settings determine the plasma stability.
“Tune” for earliest plasma ignition (during each pulse period)?
“Tune” for highest net power transfer? (Lowest reflected power and largest steady state regime electron density.)
Hold “tune” point constant over the processing time (or let the MN vary on the seconds time scale)?
MNs can deposit (stored) power during the turn-off regime.
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