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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

RF I-V signals versus time.

RF I-V signals versus time.

500 ns/div.

Current

Voltage

The voltage and current to a CC plasma through 500 mTorr argon. The voltage amplitude was set for 100 Vop and the current amplitude was measured to be

0.35 Aop at steady state.

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