Lawrence J. Overzet's
Course Catalog Page.
EE3310 ELECTRONIC DEVICES (3
semester hours) Theory of solid state electronic devices. Physical principles
of carrier motion in semiconductors leading to operating principles and
circuit models for diodes, bipolar transistors and field effect transistors.
Introduction to integrated circuits. Prerequisites: MATH 2471, PHYS 1302,
EE 3301. Corequisite: EE3210. (3-0). An
EE3210 ELECTRONIC DEVICES LABORATORY (3 semester hours)
Laboratory to accompany EE 3310. Experimental determination and illustration
of properties of carriers in semiconductors including carrier drift, photoconductivity,
and carrier diffusion; p-n junctions including forward and reverse bias
effects, transient effects, photodiodes, and light emitting diodes; bipolar
transistors including the Ebers-Moll model, and secondary effects; field
effect transistors including biasing effects, MOS capacitance and threshold
voltage. Corequisite: EE3310. (0-3). An
EE6318 PLASMA PROCESSING TECHNOLOGY (3 semester hours)
Practical information needed to understand and successfully integrate plasmas
into a VLSI device fabrication process. The requirements for plasmas in
semiconductor fabrication (ashing, etching, deposition, ultra fine line
lithography); equipment technology (vacuum reactors and pumping systems,
pressure and gas flow control, power generators and impedance matching,
wafer chucks, temperature control etc.); plasma chemistry and surface reactions;
plasma generation and properties (breakdown, bulk plasma, sheaths at surfaces);
plasma diagnostics and control; characteristics of capacitively coupled,
inductively coupled and wave coupled plasmas. Prerequisite: A background
in modern physics and elementary electromagnetic wave propagation is helpful
but not required. (3-0). An example Syllabus.
EE6320 SEMICONDUCTOR DEVICE THEORY I (3 semester hours)
Introduction to semiconductor devices including: semiconductor material
properties, the equilibrium carrier distribution, charge transport processes,
semiconductor interfaces to insulators and conductors, MOS capacitors,
Schottky barrier diodes and p-n junction diodes. Prerequisite: EE 3310
or equivalent. (3-0). An example Syllabus.
EE6322 SEMICONDUCTOR PROCESSING TECHNOLOGY (3 semester
hours) An overview of semiconductor device manufacturing technologies.
Topics include: Methods for the design of experiments, Lithography, Material
properties, Crystal doping, oxidation, Epitaxy, Etching, and diagnostic
techniques. Prerequisite: EE 3310 or equivalent. (3-0). An
EE6371 PLASMAS FOR MATERIALS PROCESSING (3 semester
hours) Theory of gas discharges related to the processing of semiconductor
devices. Movement of charges in electromagnetic fields; distribution functions
and the Boltzmann equation; fluid equation treatments; plasma sheaths;
dc, low frequency and high frequency discharge structures; plasma chemistry
and plasma diagnostic techniques. Prerequisite: A knowledge of Electromagnetic
fields and waves (EE6316 preferred) or consent of instructor. (3-0).
An example Syllabus is not yet available on-line.
EE6372 SEMICONDUCTOR PROCESS INTEGRATION (3 semester
hours) Overview of process integration issues for VLSI and ULSI including:
Device isolation, Contacts, Interconnections. Specific device integration
issues for NMOS, CMOS, Bipolar-BICMOS, and Memory (RAM and ROM). as well
as introduction to process simulation. Prerequisite: EE 6322 or equivalent.
(3-0). An example Syllabus is not yet available on-line.
EE7371 CURRENT TOPICS IN PLASMA PROCESSING (3 semester
hours) Discussion of current literature on plasma processing: applications,
diagnostics, sources, chemistry and technology. May be repeated for credit.
Prerequisite: A knowledge of Plasma Processing Technology (EE6318 Preferred)
or consent of instructor. (3-0). An
University of Texas at Dallas,
P.O. Box 830688, EC33
Richardson, TX 75083-0688
email: [email protected]
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