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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

THE UNIVERSITY OF TEXAS AT DALLAS
ERIK JONSSON SCHOOL OF ENGINEERING & COMPUTER SCIENCE

EE 6322: Semiconductor Processing Technology
Instructor: Dr. Lawrence J. Overzet
Telephone: UTD-2154; after 4 rings you get my message service
Office Hours: Are setup each semester, EC 2.930
Textbook:  "Silicon Processing for the VLSI era," S. Wolf and R. N. Tauber, Lattice Press, 1986.
Useful references: 
  "Semiconductor Integrated Circuit Processing Technology", W. Runyan and K. Bean, Addison Wesley 1990.
  "Modern GaAs Processing Methods, " R. Williams, Artech House, 1990 and
  "An Introduction to Semiconductor Microtechnology ", D. V. Morgan and K. Board, J. Wiley and Sons, 1990.

Homework will be assigned on a regular basis. Students are allowed to consult together on homework assignments; but, each student must turn in individual work. Copying someone else's homework is only going to hurt you in the long run.

A Semester Report will be required. You are required to write a 5-10 typewritten page term paper on a topic related to the fabrication or processing of semiconductor devices. (A minimum of 5 written pages plus figures. A maximum of 10 written pages INCLUDING figures.It should be double spaced and use a 12 pt. font.) It should review current literature and contain at least 4 references. You must choose your topic and have it approved by me before October 17th. It is due on November 25th. Late papers are docked 25% per day late.

There will be 1 test and a Final Exam.

Exam: 25%
Homework: 20%
Report: 20%
Final: 35%

EE6322 - Semiconductor Processing Technology
Approx. Course Syllabus: WT-1=Wolf and Tauber Chp.1, RB-4=Runyan and Bean Chp.4.
 
Lecture 
Topic 
Reading 
1 Overview of Fabrication  RB-1,2 WT prologue
Design of Experiments I  RB-11 WT-18 
3 Design of Experiments II   
4 Design of Experiments III   
5 Crystalline Semiconductors I  WT-1,2
6 Crystalline Semiconductors II   
7 Crystalline Semiconductors III   
8 Patterning I  RB-5, WT-12,13,14
9 Patterning II   
10 Patterning III   
11 Oxidation I  RB-3, WT-7 
12 Oxidation II   
13 *** Exam I ***   
14 Doping-Diffusion I  RB-8, WT-8
15 Doping-Diffusion II   
16 Doping-Diffusion III   
17 Doping-Implantation I  RB-9, WT-9 
18 Implantation II   
19 Evaluation of Doped Layers  RB-8, WT-8,9
20 Thin Films - Basics  RB-4, WT-4 
21 Thin Films - Epitaxy I  RB-7, WT-5,6 
22 Epitaxy II   
23 Epitaxy III   
24 Thin Films - Protection & Masking  RB-4 
25 Thin Films - Interconnects  RB-4, WT-10,11
26 Thin Film Diagnostics  RB-8, WT-17 
26 cont'd Reports Due   
27 ** Thanksgiving **   
28 Etching I  RB-6, WT-15,16
29 Etching II   
30 Review and close out semester   
     
  Final Exam, Comprehensive   
 
 



Grading the EE 6322 Final Reports:
 
Factors to Note:  Points  Points Rec.
1.  Does the paper have good DEPTH OF COVERAGE? 15  
2.  Does the paper use REFERENCES properly?   25  
     a. In the figure captions  7  
     b. In the Text  8  
     c. In the Bibliography  10  
3.  COHERENCE of the Argument?  10  
4.  Demonstrated UNDERSTANDING?  15  
5.  FIGURES 15  
     a. Relevant? 3  
     b. In order of reference? 2  
     c. Acceptable quality? 5  
     d. Captioned?  5  
6.  ENGLISH usage  20  
     a. Spelling 10  
     b. Grammar 10  
     
Total points: 100  
     


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University of Texas at Dallas,
P.O. Box 830688, EC33
Richardson, TX 75083-0688
Tel: (972)883-2154
Fax: (972)883-6839
email: overzet@utdallas.edu
 

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