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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

Homework will be assigned every week. Students are allowed to consult together on homework assignments; but, each student must demonstrate individual abilities during the seminar.

Each student will be required to read and/or watch scientific and industrial journals for articles relevant to plasma processing technology. The majority of these journals will be available either at the UTD Library or using the UTD online services. Some journals might require ordering articles from member libraries. The students will bring copies of relevant articles to the instructor for copying and distribution among their peers as reading assignments for subsequent weeks. In this manner, the students will in large part be allowed to determine the topics covered in the seminar. Each student will be required to give an overview of several articles during the course of the semester and the final grade will largely be determined by their participation.

Grading: There will not be a test or a Final Exam.

Homework: 100%

Textbooks
Required: None.
Recommended:

• "Principles of Plasma Discharges and Materials Processing," M. A. Lieberman and A. J. Lichtenberg, John Wiley and Sons, Inc., New York, 1994.
• "Dry Etching for VLSI," A. J. van Roosmalen, J. A. G. Baggerman, and S. J. H. Brader, Plenum Press, New York, 1991. and
• "Plasma Etching: An Introduction," in Plasma-Materials Interactions, Edited by D. M. Manos and D. L. Flamm, Academic Press, Inc., New York, 1989.

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