|
||||||||||||||||
Particle Count in UTD's NSERL Engineering Clean Room. This is the lithography bay in which | ||||||||||||||||
there is rather intense people activity, thus the particle count is high during working hours (color bands). | ||||||||||||||||
Note that the Class 10,000 particles per cubic foot designation is based on 0.5 micron sized particles | ||||||||||||||||
(Secondary axis on right). |