Analytical Module

The analytical module is equipped with a number of surface sensitive characterization methods listed below.  The module is integrated with the deposition and annealing modules to enable surface/interface analysis throughout the growth process.

• Monochromatic X-ray Photoelectron Spectroscopy

  • Automated angle resolved depth profiling

  • 500 mm Rowland Circle

  • 7 channel detector

• High Intensity Ultraviolet Photoelectron Spectroscopy

• Auger Electron Spectroscopy (scanning and static)

• Scanning Probe Microscopy (100 mm – deflection type)

• Scanning Electron Microscope

  • Specified resolution down to 250nm

  • Energy range: 200 eV - 12 keV

• Differentially pumped 5keV Ar ion source (PHI FIG-5)

• Precision manipulator

• Substrate size flexible (up to 100 mm)

• Sample Heating/cooling

• Sample azimuthal rotation for Ar ion depth profiling

• Dual loadlock (100 mm wafers or 25mm samples)