Analytical Module

The analytical module is equipped with a number of surface sensitive characterization methods listed below.  The module is integrated with the deposition and annealing modules to enable surface/interface analysis throughout the growth process.

  • Monochromatic X-ray Photoelectron Spectroscopy

    • Automated angle resolved depth profiling

    • 500 mm Rowland Circle

    • 7 channel detector

  • High Intensity Ultraviolet Photoelectron Spectroscopy

  • Auger Electron Spectroscopy (scanning and static)

  • Scanning Probe Microscopy (100 mm deflection type)

  • Scanning Electron Microscope

    • Specified resolution down to 250nm

    • Energy range: 200 eV - 12 keV

  • Differentially pumped 5keV Ar ion source (PHI FIG-5)

  • Precision manipulator

  • Substrate size flexible (up to 100 mm)

  • Sample Heating/cooling

  • Sample azimuthal rotation for Ar ion depth profiling

  • Dual loadlock (100 mm wafers or 25mm samples)

 

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