PVD Module

The physical vapor deposition module is equipped with a four-pocket 8cc electron-beam evaporation source (MBE Komponent) for metal film deposition on 100 mm substrates.    A low-temperature effusion cell for organic thin film deposition is also included. Additionally, a hydrogen cracker cell enables surface preparation of substrates.  The chamber has several integral cooling shrouds for control of the ambient in the presence of the various sources. 

The module is integrated with the deposition and annealing modules to enable the control of interfaces throughout the growth process.

 

Home Research