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MSE/EE 6322 Semiconductor Processing Technology
3 semester hours
Friday 4:00 p.m. - 6:45 p.m., ECSS2.312

Please access webCT for class materials.

Click to download: Lecture 1

Homework1: 1.2, 1.3, 1.7, 2.1 in the textbook, due Aug. 24th in class.

download: Lecture 6-Litho 2,
solutions for homework 2, homework 3, homework 4
extra practice for CH5-Lithography

Last update: Sept. 17th, 2007