My teaching interests are in the areas of integrated circuits fabrication, process integration, semiconductor devices, nanolithography (e-beam lithography, nanoimprint lithography, photolithography), and nanostructured materials.

Currently, I am teaching regularly on EE/MSEN 6322 Semiconductor processing technology for Fall semesters and EE 4330 IC Technology for Spring semesters. Besides these, I have developed a new course: EE/MSEN/PHYS 7V82 Introduction to nanolithography. This course is typically offered to graduate students in Departments of Electrical Engineering, Material Science and Engineering, and Physics once every 1.5 years. WebCT is used to disseminate the course materials.

In the future, I plan to develop courses on nanostructured soft materails for students across multiple departments.

Please let me know if you have questions regarding my education programs.