NSERL Cleanroom Research Lab
UP
TOOL IS READY FOR USE
MAINT
TOOL IS IN A SPECIFIC MAINTENANCE STATE (installation, calibration, PM, pumping down, not in use, etc.)
DOWN
TOOL IS DOWN FOR REPAIR - (Repair will take longer than 24 hours)
Updated  11/26/2008       Tool Status
Item # Room # Tool ID Tool Description Owner UP MAINT DOWN
1 1.422 TL01-1 TYSTAR LPCVD Silicon Nitride Dep   RIEKENA      
2 1.422 TL01-2 TYSTAR LPCVD Polysilicon Dep RIEKENA      
3 1.422 TL01-3 TYSTAR LPCVD Doped Polysilicon Dep RIEKENA      
4 1.422 Tl01-4 TYSTAR LPCVD Low Temp Oxide (LTO) RIEKENA      
5 1.422 TA01-1 THERMCO Minibrute - N type diffusion   RIEKENA      
6 1.422 TA01-2 THERMCO Minibrute - General use (metal anneal)   RIEKENA      
7 1.422 TA01-3 THERMCO Minibrute - Silicon only - Fg anneal-metal RIEKENA      
8 1.422 TA01-4 THERMCO Minibrute - Silicon only - Oxidation RIEKENA      
9 1.422 TC01 Cambridge Atomic Layer Deposition RIEKENA      
10 1.422 TR01 JETFIRST jipelec RTA DUENES  [1]    
11 1.422 TA02-1 Tystar ATM Furnace - Oxidation  DUENES      
12 1.422 TA02-2 Tystar ATM Furnace - Oxidation  DUENES      
13 1.422 TA02-3 Tystar ATM Furnace - Solid source doping - P type DUENES      
14 1.422 TA02-4 Tystar ATM Furnace - Solid source doping - N type DUENES      
15 1.422 TLBB01 CDO Burn Box for Thermal Bay BRADSHAW      
16 1.422 TR02 Modular Process Technology RTP-600S DUENES      
17 1.422 TR03 Modular Process Technology RTP-600S DUENES      
18 1.422 TD03 Special Coating Systems Parylene Labcoter DUENES      
19 1.432 LL01 Heidelberg DWL66 Laser Writer ROBBINS      [2]
20 1.432 CM01 ULTRATECH Mask Cleaner GOODNIGHT      
21 1.432 DM01 Leica INM 200 Optical Microscope ROBBINS      
22 1.432 LWED CPK Chrome Etch & Base Develop  GOODNIGHT      
23 1.432 LWSD CPK Solvent Spin Develop  GOODNIGHT      
24 1.432 HS02 Leatherwood Solvent Hood GOODNIGHT      
25 1.432 LC01 Q-4000 Series Quintel Contact Printer ROBBINS      
26 1.432 LS02 CEE Coat Spinner GOODNIGHT      
27 1.432 TH02 Tabletop Hotplate GOODNIGHT      
28 1.432 TH03 Tabletop Hotplate GOODNIGHT      
29 1.432 TO02 HMDS Oven GOODNIGHT      
30 1.432 TO03 Blue M Oven BRADSHAW      
31 1.432 TO04 Blue M Oven BRADSHAW      
32 1.432 TO05 Blue M Oven BRADSHAW      
33 1.432 TO06 Blue M Oven BRADSHAW      
34 1.432 TO07 Cole Parmer Oven BRADSHAW      
35 1.432 TO08 Cole Parmer Oven BRADSHAW      
36 1.432 TU01 Blue M UV Ozone Oven BRADSHAW      
37 1.432 TV01 Blue M Vacuum Oven BRADSHAW      
38 1.432 LC03 Karl Suss Contact Printer ROBBINS      
39 1.432 LS03 Headway Resist Spinner - hood ROBBINS      
40 1.432 LS04 Solitec 820-ACB Coater Track s/n 6851 ROBBINS    [3]  
41 1.430 ME03 Temescal e-gun Evaporator MAYNARD      
42 1.430 ER01 Technics Series 85-RIE (tabletop RIE) GOODNIGHT      
43 1.430 ME02 Cryo e-gun Evaporator MAYNARD      
44 1.430 EA03 March PX250 Asher MAYNARD      
45 1.430 ME04 Denton Vacuum Thermal Evaporator MAYNARD      
46 1.430 MS03 AJA International ATC 1500-V Sputter System DUENES      
47 1.430 PD01 UNAXIS PECVD RIEKENA      
48 1.430 ER02 Plasmatherm-Batchtop PR Undercut Etcher MAYNARD    [4]  
49 1.430 MS04 AJA International ORION Sputter System DUENES      
50 1.430 PE03 Oerlikon ICP - metal etch RIEKENA      
51 1.430 PE04 Oerlikon - DSE and dielectric etch DUENES      
52 1.430 PE02 STS ICP Multiplex DSE (deep silicon etch) RIEKENA    [5]  
53 1.436 ME05 CHA 50 E-Gun Vac Evap MAYNARD      
54 1.436 AB01 K&S Ball Wire Bonder BRADSHAW      
55 1.436 AB02 K&S Chisel Wire Bonder BRADSHAW      
56 1.436 CD02 Micro Tech Dual-stack Spin Rinse Dryer GOODNIGHT      
57 1.436 CD03 Tousimis Supercritical Dryer BRADSHAW      
58 1.436 CO02 Samco UV-Ozone Stripper/Cleaner model UV-1 BRADSHAW      
59 1.436 HS01 Leatherwood General Solvent Hood GOODNIGHT      
60 1.436 HA01 Leatherwood Manual Acid Hood GOODNIGHT      
61 1.436 HB01 Leatherwood Manual Base Hood GOODNIGHT      
62 1.436 HR01 Leatherwood RCA Acid Hood GOODNIGHT      
63 1.436 TO01 Thermal Oven  BRADSHAW      
64 1.436 DM08 Reichert-Jung Optical Microscope ROBBINS      
65 1.440 DM05 Leica INM 100 Optical Microscope ROBBINS      
66 1.440 DM07 LEO Supra40 FESEM w/ NPGS, EDAX & Nanoprobe DUENES  [6]    
67 1.440 DT02 SENTECH SE800 Ellipsometer BRADSHAW      
68 1.440 DP03 Alessi 4-Point Probe BRADSHAW      
69 1.440 DP04 Prometrix auto 4-Point Probe BRADSHAW      
70 1.440 DS01 Toho FLX-2320-S Wavelength Stress Measurement GOODNIGHT      
71 1.440 DT04 Veeco Dektak VIII Profilometer BRADSHAW      
72 1.440 DT05 Nanometrics Nanospec Film Thickness DUENES      
73 1.440 DA01 Thermo Electron FTIR Spectrometer DUENES      
74 1.440 MS02 Hummer - SEM sample coater GOODNIGHT      
75 1.440 LI01 Obducat Nano-Imprinter NIL-2.5" Imprint Tool HU      
76 1.440 DM09 Digital Instruments (Veeco) Dimension 5000 series SPM ROBBINS      [7]
77 1.440 DP05 Micromanipulator Probe Station BRADSHAW      
[1]
Wallace Martin:
Tool is not available on weekends until we acquire an independent water chiller for cooling.
[2]
Wallace Martin:
Stage has been shipped to Germany for repair. No information on date of return yet.
[3]
Wallace Martin:
Not installed
[4]
Wallace Martin:
Not installed
[5]
Wallace Martin:
Not installed
[6]
Wallace Martin:
A) STEM detector not available. In Germany for evaluation. B) Nabity litho not available - beam blanker problem. Zeiss to address problem on 12/1 or 12/3. C) In-lens detector non functional. D) SEM is available for standard imaging above 20kV.
[7]
Martin, Wallace W:
System won't image in tapping mode. Controller sent to Veeco for repair.