| NSERL
Cleanroom Research Lab |
| UP |
|
TOOL
IS READY FOR USE |
| MAINT |
|
TOOL
IS IN A SPECIFIC MAINTENANCE STATE (installation, calibration, PM, pumping
down, not in use, etc.) |
| DOWN |
|
TOOL
IS DOWN FOR REPAIR - (Repair will take longer than 24 hours) |
| Updated |
11/18/2009 |
|
|
|
Tool Status |
| Item # |
Room # |
Tool ID |
Tool Description |
Owner |
UP |
MAINT |
DOWN |
| 1 |
1.422 |
TL01-1 |
TYSTAR LPCVD Silicon Nitride Dep |
RIEKENA |
|
|
|
| 2 |
1.422 |
TL01-2 |
TYSTAR LPCVD Polysilicon Dep |
RIEKENA |
|
|
|
| 3 |
1.422 |
TL01-3 |
TYSTAR LPCVD Doped Polysilicon Dep |
RIEKENA |
|
|
|
| 4 |
1.422 |
Tl01-4 |
TYSTAR LPCVD Low Temp Oxide (LTO) |
RIEKENA |
|
|
|
| 5 |
1.422 |
TA01-1 |
THERMCO Minibrute - N
type diffusion |
RIEKENA |
|
|
|
| 6 |
1.422 |
TA01-2 |
THERMCO Minibrute -
General use (metal anneal) |
RIEKENA |
|
|
|
| 7 |
1.422 |
TA01-3 |
THERMCO Minibrute -
Silicon only - Fg anneal-metal |
RIEKENA |
|
|
|
| 8 |
1.422 |
TA01-4 |
THERMCO Minibrute -
Silicon only - Oxidation |
RIEKENA |
|
|
|
| 9 |
1.422 |
TC01 |
Cambridge Atomic
Layer Deposition |
RIEKENA |
|
|
|
| 10 |
1.422 |
TR01 |
JETFIRST jipelec RTA |
DUENES |
|
|
|
| 11 |
1.422 |
TA02-1 |
Tystar ATM Furnace -
Oxidation |
DUENES |
|
|
|
| 12 |
1.422 |
TA02-2 |
Tystar ATM Furnace -
Oxidation |
DUENES |
|
|
|
| 13 |
1.422 |
TA02-3 |
Tystar ATM Furnace -
Solid source doping - P type |
DUENES |
|
|
|
| 14 |
1.422 |
TA02-4 |
Tystar ATM Furnace -
Solid source doping - N type |
DUENES |
|
|
|
| 15 |
1.422 |
TLBB01 |
CDO Burn Box for
Thermal Bay |
BRADSHAW |
|
|
|
| 16 |
1.422 |
TR02 |
Modular Process
Technology RTP-600S |
DUENES |
|
|
|
| 17 |
1.422 |
TR03 |
Modular Process
Technology RTP-600S |
DUENES |
|
|
|
| 18 |
1.422 |
TD03 |
Special Coating
Systems Parylene Labcoter |
DUENES |
|
|
|
| 19 |
1.432 |
LL01 |
Heidelberg DWL66 Laser Writer |
ROBBINS |
|
|
|
| 20 |
1.432 |
CM01 |
ULTRATECH Mask
Cleaner |
GOODNIGHT |
|
|
|
| 21 |
1.432 |
DM01 |
Leica INM 200 Optical
Microscope |
ROBBINS |
|
|
|
| 22 |
1.432 |
LWED |
CPK Chrome Etch & Base Develop |
GOODNIGHT |
|
|
|
| 23 |
1.432 |
LWSD |
CPK Solvent Spin Develop |
GOODNIGHT |
|
|
|
| 24 |
1.432 |
HS02 |
Leatherwood Solvent
Hood |
GOODNIGHT |
|
|
|
| 25 |
1.432 |
LC01 |
Q-4000 Series Quintel
Contact Printer |
ROBBINS |
|
|
|
| 26 |
1.432 |
LS02 |
CEE Coat Spinner |
GOODNIGHT |
|
|
|
| 27 |
1.432 |
TH02 |
Cole Parmer Tabletop
Hotplate |
GOODNIGHT |
|
|
|
| 28 |
1.432 |
TH03 |
Cole Parmer Tabletop
Hotplate |
GOODNIGHT |
|
|
|
| 29 |
1.432 |
TH04 |
TPS Digital Hotplate - exhausted
enclosure |
GOODNIGHT |
|
|
|
| 30 |
1.432 |
TH05 |
TPS Digital Hotplate - exhausted
enclosure |
GOODNIGHT |
|
|
|
| 31 |
1.432 |
TH06 |
TPS Digital Hotplate - exhausted
enclosure |
GOODNIGHT |
|
|
|
| 32 |
1.432 |
TH07 |
TPS Digital Hotplate - exhausted
enclosure |
GOODNIGHT |
|
|
|
| 33 |
1.432 |
TO02 |
HMDS Oven |
GOODNIGHT |
|
|
|
| 34 |
1.432 |
TO03 |
Blue M Oven |
BRADSHAW |
|
|
|
| 35 |
1.432 |
TO04 |
Blue M Oven |
BRADSHAW |
|
|
|
| 36 |
1.432 |
TO05 |
Blue M Oven |
BRADSHAW |
|
|
|
| 37 |
1.432 |
TO06 |
Blue M Oven |
BRADSHAW |
|
|
|
| 38 |
1.432 |
TO07 |
Cole Parmer Oven |
BRADSHAW |
|
|
|
| 39 |
1.432 |
TU01 |
Blue M UV Ozone Oven |
BRADSHAW |
|
|
|
| 40 |
1.432 |
TV01 |
Blue M Vacuum Oven |
BRADSHAW |
|
|
|
| 41 |
1.432 |
LC03 |
Karl Suss Contact
Printer |
ROBBINS |
|
|
|
| 42 |
1.432 |
LS03 |
Headway Resist
Spinner - hood |
ROBBINS |
|
|
|
| 43 |
1.430 |
ME03 |
Temescal e-gun Evaporator |
MAYNARD |
|
|
|
| 44 |
1.430 |
ER01 |
Technics Series
85-RIE (tabletop RIE) |
GOODNIGHT |
|
|
|
| 45 |
1.430 |
ME02 |
Cryo e-gun Evaporator |
MAYNARD |
|
|
|
| 46 |
1.430 |
EA03 |
March PX250 Asher |
MAYNARD |
|
|
|
| 47 |
1.430 |
ME04 |
Denton Vacuum Thermal
Evaporator |
MAYNARD |
|
|
|
| 48 |
1.430 |
MS03 |
AJA International ATC
1500-V Sputter System |
DUENES |
|
|
|
| 49 |
1.430 |
PD01 |
UNAXIS PECVD |
RIEKENA |
|
|
|
| 50 |
1.430 |
MS04 |
AJA International
ORION Sputter System |
DUENES |
|
|
|
| 51 |
1.430 |
PE03 |
Oerlikon ICP - metal
etch |
RIEKENA |
|
|
|
| 52 |
1.430 |
PE04 |
Oerlikon - DSE and
dielectric etch |
DUENES |
|
|
|
| 53 |
1.430 |
PE02 |
STS ICP Multiplex DSE
(deep silicon etch) |
RIEKENA |
|
[1] |
|
| 54 |
1.436 |
ME05 |
CHA 50 E-Gun Vac Evap |
MAYNARD |
|
|
|
| 55 |
1.436 |
AB01 |
K&S Ball Wire Bonder |
BRADSHAW |
|
|
|
| 56 |
1.436 |
AB02 |
K&S Chisel Wire
Bonder |
BRADSHAW |
|
|
|
| 57 |
1.436 |
CD02 |
Micro Tech Dual-stack
Spin Rinse Dryer |
GOODNIGHT |
|
|
|
| 58 |
1.436 |
CD03 |
Tousimis
Supercritical Dryer |
BRADSHAW |
|
|
|
| 59 |
1.436 |
CO02 |
Samco UV-Ozone
Stripper/Cleaner model UV-1 |
BRADSHAW |
|
|
|
| 60 |
1.436 |
HS01 |
Leatherwood General
Solvent Hood |
GOODNIGHT |
|
|
|
| 61 |
1.436 |
HA01 |
Leatherwood Manual
Acid Hood |
GOODNIGHT |
|
|
|
| 62 |
1.436 |
HB01 |
Leatherwood Manual
Base Hood |
GOODNIGHT |
|
|
|
| 63 |
1.436 |
HR01 |
Leatherwood RCA Acid
Hood |
GOODNIGHT |
|
|
|
| 64 |
1.436 |
TO01 |
Thermal Oven |
BRADSHAW |
|
|
|
| 65 |
1.436 |
DM08 |
Reichert-Jung Optical
Microscope |
ROBBINS |
|
|
|
| 66 |
1.440 |
DM05 |
Leica INM 100 Optical Microscope |
ROBBINS |
|
|
|
| 67 |
1.440 |
DM07 |
LEO Supra40 FESEM w/
NPGS, EDAX & Nanoprobe |
DUENES |
|
|
|
| 68 |
1.440 |
DT02 |
SENTECH SE800
Ellipsometer |
BRADSHAW |
|
|
|
| 69 |
1.440 |
DP03 |
Alessi 4-Point Probe |
BRADSHAW |
|
|
|
| 70 |
1.440 |
DP04 |
Prometrix auto
4-Point Probe |
BRADSHAW |
|
|
|
| 71 |
1.440 |
DS01 |
Toho FLX-2320-S
Wavelength Stress Measurement |
GOODNIGHT |
|
|
|
| 72 |
1.440 |
DT04 |
Veeco Dektak VIII
Profilometer |
BRADSHAW |
|
|
|
| 73 |
1.440 |
DT05 |
Nanometrics Nanospec
Film Thickness |
DUENES |
|
|
|
| 74 |
1.440 |
DA01 |
Thermo Electron FTIR Spectrometer |
DUENES |
|
|
|
| 75 |
1.440 |
MS02 |
Hummer - SEM sample
coater |
GOODNIGHT |
|
|
|
| 76 |
1.440 |
LI01 |
Obducat
Nano-Imprinter NIL-2.5" Imprint Tool |
HU |
|
|
|
| 77 |
1.440 |
DM09 |
Digital Instruments
(Veeco) Dimension 5000 series SPM |
ROBBINS |
|
|
|
| 78 |
1.440 |
DP05 |
Micromanipulator
Probe Station |
BRADSHAW |
|
|
|
|
|
|
|
|
|
|
|
