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Development of Wide-Band Vibration Sensors Based On Texas Instruments Existing Process Platforms by Professor Siavash Pourkamali
Friday, Nov 17, 2017
1 p.m. - 2 p.m. Location: ECSS 3.503

One of the major bottlenecks against widespread development and commercialization of micro-electro-mechanical systems (MEMS) is the need for development of unconventional and relatively sophisticated microfabrication processes.  Therefore, development of MEMS sensors and actuators within a standardized fabrication process, e.g. the CMOS process is of great interest. The goal of this ongoing SRC project is to implement, characterize and optimize low power chip-scale vibration sensors and vibration spectrum analyzers that can operate over a wide range of frequencies from DC to 10kHz with a resolution of 1mg or better. The goal is for the vibration sensors to be realized without any modifications to an existing Texas Instruments CMOS process. For lower frequency vibrations the entire silicon chip with an added mass can be used as a cantilever responding to vibrations. N-well resistors arranged in wheatstone bridge configuration are used as strain gauges measuring stress on the chip resulting from vibrations.  For higher frequency vibrations a number of microscale cantilevers are embedded within a CMOS chip with each cantilever only covering a small frequency range around its resonance frequency. The cantilevers are released and undercut via minimal post-processing etch steps without the need for any additional lithography. Similar post-processing techniques can be used to integrate a variety of electromechanical transducers within CMOS chips.

Siavash Pourkamali received the B.S. degree in electrical engineering from Sharif University of Technology, Tehran, Iran, in 2001, and the M.S. and Ph.D. degrees in electrical engineering from Georgia Institute of Technology, Atlanta, Georgia in 2004 and 2006, respectively. From 2006 to 2012 he was an Assistant Professor at the Department of Electrical and Computer Engineering, University of Denver.  Currently he is an Associate Professor at the Department of Electrical and Computer Engineering, University of Texas at Dallas. His main research interests are in the areas of integrated silicon-based MEMS and microsystems, electro-thermal nanomechanical actuation, M/NEMS resonators and filters, and resonant sensors. He has authored over 120 papers in international journals and refereed conferences and holds several issued patents and pending patent applications. Dr. Pourkamali is a recipient of the 2011 NSF CAREER Award, the 2008 University of Denver Best Junior Scholar Award, and the 2005 Georgia Tech Electrical and Computer Engineering Research Excellence Award. He is also a silver medal winner in the 29th International Chemistry Olympiad (ICHO), 1997.

Contact Info:
Donna Kuchinski, 972-883-5556
Questions? Email me.

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