Research Capabilities - Young Research Group

Young Research Group
The University of Texas at Dallas
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Research Capabilities

The Young Research Group is primarily focused on being able to properly evaluate/analyze new material(s) and device(s) integration by innovating novel electrical characterization methodologies and/or evolving conventional techniques to be applicable. Our research portfolio contains fundamental, physical mechanism investigations for performance and degradation studies as a function of the device structure and/or fabrication process.
Capability Overview
For electrical characterization and reliability measurements, the eCOMETS (electrical Characterization of Materials Evaluation Test Structures) laboratory is equipped with a Cascade Summit series probe station with integrated environmental control capable of probing structures on wafers (up to 200 mm diameter) over a temperature range of -65 to 200 °C. The probe station provides for current measurement down to fA and capacitance measurement down to tens of fF. A Lakeshore Cryogenic low temperature probe station expands the accessible temperature range and permits device level characterization on structures down to temperatures of ~4.5K. Using these probe stations in conjunction with appropriate test equipment coupled with robust analysis, our group conducts comprehensive electrical characterization methodologies (includes measurement and analysis) that will provide important, fundamental properties electrically active defects (i.e., traps). Specific measurement techniques are applied to provide trap properties that will be corroborated with physical characterization methods and modeling/simulation to ascertain the physical nature of the defects found. Currently, we are investigating various inorganic, non-silicon-based semiconductors with high-k dielectrics for future nanodevice applications [e.g., transition metal dichalcogenides (TMDs), zinc oxide (ZnO), Group II-VI materials, hafnium-based dielectrics, etc.].

Through a collaboration with the Everbeing Int'l Corp. and the eCOMETS lab, Everbeing has generously donated a Everbeing EB6IMG_probe station and SR-4 Four Point Probe which has help expose students' and other interested parties' to their products while enabling additional accessibility and exposure to those interested in using these systems. Chad met Hsiao Taylor, a representative of Everbeing Int'l Corp, at International Conference on Microelectronic Test Structures (ICMTS) 2016 in Yokohama, Japan. It is Everbeing's wish to gain marketshare in the US while there is a need for affordable and easy to use tools for electrical measurements by students and researchers. We look forward to helping them reach this goal.
eCOMETS Laboratory Equipment

ToolsCapability
C-V
  • Agilent 4284A
  • Keithley 590
  • Agilent E4980A
  • Multi-frequency C-V (2 Hz to 2MHz)
  • Conductance
DC I-V
  • Agilent 4155
  • Keithley 4200-SCS
  • Keithley 2636B
  • Typical DC test (Ig-Vg, Id-Vg, Id-Vd)
  • DCIV (interface characterization)
  • Time/Sample measurements (BD study)
Pulse I-V/C-V
  • Custom Set up: Agilent 81110A, digital storage oscilloscope, power supplies, current preamplifier
  • "Single" Pulse I-V, Ramped pulse I-V
  • Id-Pulse Time
Charge Pumping
  • Keithley 4200-SCS
  • Fixed & Variable amplitude
  • Frequency Dependent
LFN/RTN
  • NoisePro ® 9812B
  • Low Freq. Noise, Random Telegraph Noise
Reliability
  • Agilent 4155
  • Keithley 4200-SCS
  • Keithley 2636B
  • BTI, HCI, TDDB, TZBD, SILC
eCOMETS Laboratory measurement equipment and capabilities
Additional Information
Additional fabrication and physical characterization capability information may be found at the following links:
 
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